ASTM F3166-16
- Standard Specification for High-Purity Titanium Sputtering Target Used for Through-Silicon Vias (TSV) Metallization
- standard by ASTM International, 05/01/2016
- Publisher: ASTM
$22.00$44.00
1.1 This specification details the generic criteria requirements of high pure titanium sputtering targets used as thin film material for through-silicon vias (TSV) metallization in advance packaging.
Related Products
ASTM A450/A450M-03
Standard Specification for General Requirements for Carbon, Ferritic Alloy, and Austenitic Alloy Ste..
$26.00 $52.80
ASTM D5757-11
Standard Test Method for Determination of Attrition and Abrasion of Powdered Catalysts by Air Jets..
$20.00 $39.00
ASTM D2126-04
Standard Test Method for Response of Rigid Cellular Plastics to Thermal and Humid Aging..
$23.00 $46.80