• AWWA JAW56657
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AWWA JAW56657

  • Journal AWWA - Planning for Water Reclamation in a Semiconductor Fabrication Facility
  • Journal Article by American Water Works Association, 07/01/2002
  • Publisher: AWWA

$15.00$30.00


Semiconductor manufacturing is one of the most waterintensiveindustries. In 1996, Intel Corporation, a largesemiconductor manufacturer, used 13.2 mgd (50 ML/d)worldwide. Faced by rising water costs, scarcity of supplies, andheightened public awareness about industrial waste, the microelectronicsindustry has been investigating options for mitigatingthe environmental effects of its manufacturing processes. Thisstudy was undertaken to show how water reclamation usingexisting technologies can be effectively used.Water reclamation reduces the amount of water needed byreusing and recycling wastewater from manufacturing processes.A generic design for a water reclamation plan was developed fora large-scale microelectronic production facility in central Arizona.The design included system descriptions, diagrams, and flowanalyses and can be modified to address regional climates,wastewater infrastructure, source water quality, and dischargeregulation.Although modifications to plant systems may incur high capitalcosts, the payback period can be as little as several months.Semiconductor manufacturers can reap even greater savings byincorporating reclamation planning in the design of newfacilities. Includes 19 references, figure.

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