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IEST G-CC035.1
- Design Considerations for AMC Filtration Systems in Cleanrooms
- Recommended Practice by Institute of Environmental Sciences and Technology, 07/01/2009
- Publisher: IEST
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This Guideline provides information for designing filtration systems to eliminate trace amounts (less than 1 ppmv) of airborne molecular contamination (AMC) from the air supplied to cleanrooms and other controlled environments. The document covers applications, potential points of use, filtration methods, construction materials, performance comparison, and follow-up assessment. Also discussed are secondary impacts of the filters on the HVAC system and exterior impacts on the filtration system.
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