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IEST RP-CC012.2
- Considerations in Cleanroom Design
- Recommended Practice by Institute of Environmental Sciences and Technology, 01/01/2007
- Publisher: IEST
$121.00$242.50
This RP reviews factors to consider in the design of cleanroom facilities, provides a framework to establish performance criteria, and includes details on specific processes and systems. A new section on energy efficiency helps users evaluate initial costs and life-cycle costs and includes a table of energy-conserving steps. The document also covers contamination control procedures for the construction phase.