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IEST RP-CC031.2
- Method for Characterizing Outgassed Organic Compounds from Cleanroom Materials and Components
- Recommended Practice by Institute of Environmental Sciences and Technology, 01/01/2008
- Publisher: IEST
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This newly revised Recommended Practice (RP) describes a method for characterizing organic compounds outgassed from materials or components exposed to air or gasses in cleanrooms and other controlled environments. The RP is relevant to industries that may experience adverse production yields as a result of gaseous organic contamination, also known as volatile organic compounds (VOCs) and semivolatile organic compounds (SVOCs). This document provides both a semiquantitative determination and a qualitative identification of a large range of compounds detectable by dynamic headspace gas chromatography-mass spectrometry (GC-MS).
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