SME ER98-318

As the development of micro-mechanical devices and systems advances, process capabilities and diversity are increasing. In the past, micro-machines were fabricated by lithography and etching of silicon, as an outgrowth of the semiconductor industry. While this process remains the backbone of micro-sensor technology, many other processes have been developed which utilize a wide variety of materials, dimensions, and aspect ratios for mechanical and electromechanical components. Examples of these processes include deep x-ray lithography, micro-electroforming, replication in plastics by micro-injection molding and hot embossing, laser ablation and photopolymerization, and direct micro-mechanical machining techniques.

Product Details

Published:

11/01/1998

Number of Pages:

6

File Size:

1 file , 1.2 MB