SME MR99-249

In order to develop a high stiffness ultraprecision centerless grinding machine for grinding of ceramic ferrules and rollers for optical fiber communication and ultraprecision bearing applications, an ultra-stiff nanoprecision linear piezomotor was recently developed. This linear piezomotor was designed to have a positioning resolution of 5 nm, and a feed system stiffness of about 2190 N/?m. Three high-voltage piezoelectric actuators were integrated by a monolithic flexure frame. This monolithic frame was designed to have multi-functions such as protecting and preloading three piezoelectric actuators and withstanding all the shearing forces during operation. The monolithic frame as a motion mechanism eliminates backlash problem. The stiffness distributions in certain directions over the frame were designed using FEM. The microdynamic behavior of the piezomotor was studied to predict its

Product Details

Published:

11/01/1999

Number of Pages:

12

File Size:

1 file , 1.1 MB