SME MS00-236

Current and future laser measurement services at 157, 193 and 248 nm will be reviewed. Laser power and energy measurements at 193 nm will be presented; electrical calibration issues will be reviewed. We report an overall calibration uncertainty of laser power and energy meters of less than 2%. Characterization measurements for ultraviolet materials also will be discussed.

Product Details

Published:

11/01/2000

Number of Pages:

3

File Size:

1 file , 330 KB