• Your shopping cart is empty!

  • SME MS00-236
Provide PDF Format

Learn More

SME MS00-236

  • New Developments In Deep Ultraviolet Laser Metrology For Photolighography
  • standard by Society of Manufacturing Engineers, 11/01/2000
  • Publisher: SME

$9.00$18.00


Current and future laser measurement services at 157, 193 and 248 nm will be reviewed. Laser power and energy measurements at 193 nm will be presented; electrical calibration issues will be reviewed. We report an overall calibration uncertainty of laser power and energy meters of less than 2%. Characterization measurements for ultraviolet materials also will be discussed.

Product Details

Published:
11/01/2000
Number of Pages:
3
File Size:
1 file , 330 KB

Related Products

SME MS900253

SME MS900253

Total Tool Management--The Big Puzzle..

$9.00 $18.00

SME MR920194

SME MR920194

Sfpm & Rpm = High Speed Machining..

$9.00 $18.00

SME MS900470

SME MS900470

A Means To Implement Just-In-Time Manufacturing In A Multi-Product, Cyclical..

$9.00 $18.00

SME AD99-218

SME AD99-218

Resistance Ring Projection Welding - The Basics Of The Application And Equipment..

$9.00 $18.00