SME MS900218

THIS PAPER FOCUSES ON DISTRIBUTED REAL-TIME CONTROL OF SEMICONDUCTOR PROCESS EQUIPMENT. OBJECT-ORIENTED DESIGN CONCEPTS ARE PRESENTED FOR CLUSTER CONTROL OF ADVANCED WET AND DRY CHEMICAL CLEANING OF SILICON WAFERS. THE REQUIREMENTS FOR MODULARITY, MAINTAINABILITY, AND EXTENSIBILITY ARE ADDRESSED USING OBJECT-ORIENTED DESIGN TECHNIQUES. OBJECT-ORIENTED DESIGN IS COMPARED AND CONTRASTED WITH FUNCTION-ORIENTED DESIGN. AN EXAMPLE OF OBJECT-ORIENTED ANALYSIS IS PRESENTED FOR A MULTISTATION SINGLE WAFER CLEANING SYSTEM.

Product Details

Published:

06/01/1990

Number of Pages:

14

File Size:

1 file , 1 MB