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SME MS900320
- A Replicated Self-Coupling Hydrostatic Leadscrew For Sub-Micron Applications
- standard by Society of Manufacturing Engineers, 06/01/1990
- Publisher: SME
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THE DESIGN AND TEST RESULTS FOR A NEW TYPE OF HYDROSTATIC LEADSCREW ARE PRESENTED. THE LEADSCREW HAS THE FOLLOWING PROPERTIES: IT HAS NO WEAR AND NO STATIC FRICTION; ITS AXIAL RESOLUTION AND TRAVERSE RATE ARE LIMITED ONLY BY THE PERFORMANCE OF THE DRIVE MOTOR AND POSITION SENSOR; IT IS ONLY RIGID ALONG THE AXIS OF MOTION SO IT CANNOT CAUSE ERRORS (E.G. STRAIGHTNESS ERRORS) DUE TO MISALIGNMENT BETWEEN THE ACTUATOR AND THE CARRIAGE; HENCE IT IS SELF COUPLING. A FULL-SCALE TESTBED WAS DESIGNED AND BUILT AND IT VERIFIED THAT THE SELF-COUPLING HYDROSTATIC LEADSCREW MET ALL THE DESIGN REQUIREMENTS, AND ITS LARGE SELF-COUPLING CAPABILITY MAKES IT ECONOMICAL TO MANUFACTURE AND INSTALL.
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