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ASTM F24-09(2015)
- Standard Test Method for Measuring and Counting Particulate Contamination on Surfaces
- standard by ASTM International, 10/01/2015
- Publisher: ASTM
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1.1 This test method covers the size distribution analysis of particulate contamination, 5 μm or greater in size, either on, or washed from, the surface of small electron-device components. A maximum variation of two to one (±33 % of the average of two runs) should be expected for replicate counts on the same sample.